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Design of a Capacitive based Closed-Loop Displacement Sensor: Conceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer

49.00 EUR

Ein praxisnaher Ratgeber, der die Entwicklung eines kapazitiven MEMS‑Deformationsmessers beschreibt, der kleiner als 1 mm² ist und in geschlossenen Regelkreisen eine Auflösung von einem Nanometer erreicht, wobei neue Schaltungsarchitekturen und Mikrostrukturverfahren vorgestellt werden.

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